Process investigations of optical trap assisted direct-write microsphere near-field nanostructuring

In a wide range of technological and biomedical applications nanostructured surfaces become increasingly important. Laser based techniques utilizing near-field focusing of pulsed laser radiation by microsphere particles allow a robust, low-cost nanopatterning at sub-diffraction-limited resolution. In combination with optical tweezers a direct-write nanostructuring becomes feasible. In this contribution, a fundamental simulational study of optical trap assisted ultrafast direct-write near-field nanostructuring showing the influence of the main process parameters is presented.