Vibration assisted nano mechanical machining using AFM probe

Tip-based nano mechanical machining can remove materials with nanometer accuracy by engaging an atomic force microscope (AFM) probe onto the workpiece. Vibration assisted nano mechanical machining is proposed by externally actuating the workpiece in elliptical motions in the XY plane and linear motion in the Z-axis. Effects of different vibration techniques on forces and geometry of grooves were investigated. XY planar and Z-axis vibration assisted nano mechanical machining reduced cutting forces, apparent friction and burr formation and increased the depth of groove (DOG). The method enables the fabrication of complex nanoscale geometries.