A new preparation method for cross-sectional TEM specimens

This article presents a new and more time-saving method for the preparation of cross-sectional TEM specimens from coated materials. The preparation procedure includes prepreparation, mounting, embedding, mechanical thinning, and ion-beam thinning. Some special techniques used are also discussed. The main features of the method are as follows: (a) The sample was sandwiched between silicon sheets and then cast in a 3-mm-diameter brass tube with epoxy. The mounted specimen was cured, and then thin slices were cut from the tube. (b) The slice was reinforced on one side with a thin slit disc of beryllium-copper alloy. (c) The assembly was ground, prethinned, and then ion-beam thinned to perforation. This technique has been applied to prepare various interfaces. The specimens prepared by this technique were investigated by TEM, and the results are presented to illustrate the performance of this technique.