Title of article
An infrared pyroelectric detector improved by cool isostatic pressing with cup-shaped PZT thick film on silicon substrate
Author/Authors
Peng، نويسنده , , Q.X. and Wu، نويسنده , , C.G. and Luo، نويسنده , , W.B. and Chen، نويسنده , , C. and Cai، نويسنده , , G.Q. and Sun، نويسنده , , X.Y. and Qian، نويسنده , , D.P.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
6
From page
313
To page
318
Abstract
In this paper, we presented a new pyroelectric detector with back to back silicon cups and micro-bridge structure. The PZT thick film shaped in the front cup was directly deposited with designed pattern by electrophoresis deposition (EPD). Pt/Ti Metal film, which was fabricated by standard photolithography and lift-off technology, was sputtered to connect the top electrode and the bonding pad. The cold isostatic press (CIP) treatment could be applied to improve the pyroelectric properties of PZT thick film. The infrared (IR) properties the CIP-optimized detector were measured. The voltage responsivity (RV) was 4.5 × 102 V/W at 5.3 Hz, the specific detectivity (D*) was greater than 6.34 × 108 cm Hz1/2 W−1 (frequency > 110 Hz), and the thermal time constant was 51 ms, respectively.
Keywords
PZT , Infrared , Detectivity , pyroelectric
Journal title
Infrared Physics & Technology
Serial Year
2013
Journal title
Infrared Physics & Technology
Record number
2376432
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