Transient behavior of electrostatically actuated micro systems considering squeeze film damping and mechanical shock

In this paper, the dynamics of microbeams under the eects of electrostatic force, mechanical shock, Squeeze Film Damping (SQFD), and fringing eld are modeled. A Galerkin-based reduced-order model is used to convert the Partial Dierential Equation of motion (PDE) to an Ordinary Dierential Equation (ODE). Furthermore, the system dynamics are studied using the developed nonlinear nite element code. Two dierent simpler models are validated by the results in the literature, which are in good compatibility with them. It is shown that the eect of squeeze lm damping can dominate mechanical shock signicantly. The response of microbeam to electrostatic actuation is also delayed when damping is included. The simultaneous and sole eects of electrostatic actuation, mechanical shock, squeeze lm damping, and fringing eld are investigated in this study for the rst time.