Title of article
Effect of Thickness on Structural and Morphological Properties of AlN Films Prepared Using Single Ion Beam Sputtering
Author/Authors
Hajakbari, Fatemeh Physics Department - Karaj Branch, Islamic Azad University, Karaj , Hojabri, Alireza Physics Department - Karaj Branch, Islamic Azad University, Karaj , Mojtahedzadeh Larijani, Majid Agricultural Medical and Industrial Research School - Nuclear Science and Technology Research Institute, Karaj
Pages
8
From page
45
To page
52
Abstract
Aluminum nitride (AlN) thin films have potential applications in microelectronic and optoelectronic devices. In this study, AlN thin films with different thicknesses were deposited on silicon substrate by single ion beam sputtering method. The X-ray diffraction (XRD) spectra revealed that the structure of films with thickness of - nm was amorphous, while the polycrystalline hexagonal AlN with a rough surface was observed at a thickness of nm. Also, the formation of AlN in amorphous films is identified by Fourier transform infrared (FTIR) spectroscopy. Atomic force microscopy (AFM) study confirms that the surface roughness and average grain size of films increased with film thickness.
Keywords
AlN , Ion beam sputtering , optical properties , Structural Properties
Serial Year
2014
Record number
2494132
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