Kesan Suhu Sepuh Lindap ke atas Mikrostruktur, Morfologi Permukaan dan Komposisi Filem Nipis Ba_0.5Sr_0.5tio_3 yang Disediakan dengan Kaedah Sol Gel

In general, the sol-gel process involves the transition of a solution system from a liquid sol into a solid gel phase. In this study, Ba0.5Sr0.5TiO3 (BST) thin films have been prepared by the sol-gel technique using starting materials, Ba(C4H6O4), Sr(CH3CO2)4 and (Ti(OCHCH3)2)4. The thin films were annealed at temperature at 6000C, 6500C and 7000C for 1 hour in atmosphere. The microstructure, morphologies and compositions of the films that were annealed were determined using XRD, AFM and EDS techniques. The results show that increasing the annealing temperature increased the crystallinity and surface roughness of the films. The Ba/Sr ratio decreased when the annealing temperature increased.