Title of article
Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches
Author/Authors
Tamsir, Agus Santoso university of indonesia - Department of Electrical Engineering, MinaEMS-RG (Micro-Nano Electro-Mechanical System-Research Group), Indonesia , Wijaya, Sandy Tannu university of indonesia - Faculty of Engineering - Department of Electrical Engineering, Indonesia , Majlis, Dato’ Burhanuddin Yeop Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics, Malaysia
From page
59
To page
62
Abstract
The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.
Keywords
capacitor , comb , drive actuators , resonance frequencies , RF , MEMS varactor
Journal title
Makara Journal Of Technology
Journal title
Makara Journal Of Technology
Record number
2717614
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