Design and analysis of a MOEMS accelerometer using all-dielectric meta-materials based on Fano Resonance

This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation. This paper introduces a novel micro-opto-electro-mechanical-systems accelerometer that leverages a tunable all-dielectric meta-material. The device operates by modulating the wavelength of incident light-wave. The utilized metamaterial takes advantage of highly tunable ultra-sharp Fano resonance peaks to create a high-performance accelerometer, offering enhanced sensitivity and resolution. Simulation results indicate the functional attributes of the proposed sensor: a mechanical sensitivity of 0.13 nm/g, a linear measurement range spanning ±38.4 g, and an overall sensitivity of 1.17 nm/g. These characteristics render the device applicable across a broad spectrum of uses, from consumer electronics to inertial navigation.