Title of article
Design and performance of an excimer-laser based optical system for high precision microstructuring
Author/Authors
K. -H. Gerlach، نويسنده , , J. Jersch، نويسنده , , K. Dickmann and L. J. Hildenhagen، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
9
From page
439
To page
447
Keywords
beam conditioning optics , Excimer lasers , rnicrostructuring
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
1997
Journal title
OPTICS & LASER TECHNOLOGY
Record number
334632
Link To Document