Title of article
Fabrication of high-frequency electron beam moiré grating using multi-deposited layer techniques
Author/Authors
Huimin Xie، نويسنده , , Satoshi Kishimoto and Norio Shinya، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
7
From page
361
To page
367
Keywords
Model grating , electron beam lithography , Multi-deposited layer method , Electron beam moir e
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2000
Journal title
OPTICS & LASER TECHNOLOGY
Record number
334753
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