Title of article
Projection ablation of glass-based single and arrayed microstructures using excimer laser
Author/Authors
Ying-Tung Chen، نويسنده , , Kung-Jeng Ma، نويسنده , , Ampere A. Tseng and P. H. Chen، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
10
From page
271
To page
280
Keywords
excimer laser , GLASS , Micromachining , Polyimide , Microneedle , Silicon , Ablation , Debris , Ablation rate , Arrayed microstructure , morphology
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2005
Journal title
OPTICS & LASER TECHNOLOGY
Record number
335157
Link To Document