Title of article
Determination of maximum allowable strain for polysilicon micro-devices
Author/Authors
S. C. Bromley، نويسنده , , L. L. Howell and B. D. Jensen، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
15
From page
27
To page
41
Keywords
strain analysis , Micro-mechanical systems , brittle fracture , electronic-device failures
Journal title
Engineering Failure Analysis
Serial Year
1999
Journal title
Engineering Failure Analysis
Record number
349109
Link To Document