Title of article
Development of an inter-process linkage technology for fluoro-nitric acid washing-agent and its LCA evaluation
Author/Authors
Uesugi، Hiroshi نويسنده , , Suginaka، Tomohiro نويسنده , , Fujiwara، Masashi نويسنده , , Kuwauchi، Yuki نويسنده , , Hirao، Masahiko نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
-212
From page
213
To page
0
Abstract
Fluoro-nitric acid used in the semiconductor industry as a washing agent is of high purity and high concentration (fluoric acid: 23.3%, nitric acid: 16.6%). It is recovered using separation and control in the semiconductor industry. A technology for utilizing this acid byproduct as a pickling solution for stainless steel sheets in the steel industry was developed. The results of a Life-Cycle Assessment study showed that a cascade of 10 tons of acid byproducts reduces energy consumption by 4.0 tons in crude oil conversion value, CO2 emissions by 4.3 tons, and sludge generation by 24.8 tons.
Keywords
Washing agent , Inter-process linkage , Life-cycle assessment , Stainless steel , Semiconductor , Fluoro-nitric acid
Journal title
Applied Energy
Serial Year
2005
Journal title
Applied Energy
Record number
3530
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