Title of article
Analyses of composition and chemical shift of silicon oxynitride film using energy-filtering transmission electron microscope based spatially resolved electron energy loss spectroscopy
Author/Authors
K. Kimoto، نويسنده , , K. Kobayashi، نويسنده , , T. Aoyama ، نويسنده , , Y. Mitsui، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
7
From page
121
To page
127
Keywords
Electron energy loss spectroscopy (EELS) , Energy-filtering transmission electron microscope , Spatially resolved EELS , Chemical shift , Siliconoxynitride
Journal title
Micron
Serial Year
1999
Journal title
Micron
Record number
356771
Link To Document