Title of article

High-depth-resolution Auger depth profiling/atomic mixing

Author/Authors

M. Menyhard، نويسنده ,

Issue Information

روزنامه با شماره پیاپی سال 1999

Pages

11

From page

255

To page

265

Keywords

Ion-induced damage , TRIM simulation , Atomic mixing , Auger depth profiling

Journal title

Micron

Serial Year

1999

Journal title

Micron

Record number

356787