Title of article
Room temperature oxidation of Cu3Ge films grown on Si and Si1−xGex substrates
Author/Authors
Hsuan-Han Liang، نويسنده , , Jian-Shing Luo ، نويسنده , , Wen-Tai Lin، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
4
From page
561
To page
564
Keywords
Cu3Si-catalyzed oxidation , Cu3Ge films , Cu3(Si1?xGex) films
Journal title
Micron
Serial Year
2002
Journal title
Micron
Record number
357035
Link To Document