Title of article
Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems
Author/Authors
H. KATTELUS، نويسنده , , M. YLONEN، نويسنده , , M. BLOMBERG، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
7
From page
743
To page
749
Keywords
amorphousmetals , Mo–N , Mo–Si–N , nanoindentation. , metallic micromachining
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Serial Year
2005
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Record number
359876
Link To Document