• Title of article

    System-level simulation of vibratory micromachined gyroscope with fence structure

  • Author/Authors

    Che Lufeng، نويسنده , , Xiong Bin ، نويسنده , , Wang Yuelin ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    6
  • From page
    172
  • To page
    177
  • Keywords
    MEMS , Equivalent electrical simulation , angular rate sensor
  • Journal title
    Acta Mechanica Sinica
  • Serial Year
    2004
  • Journal title
    Acta Mechanica Sinica
  • Record number

    360449