Title of article
Experimental Determination of Micromachined Discrete and Continuous Device Spring Constants Using Nanoindentation Method
Author/Authors
M.L. Chan، نويسنده , , Francis E.H. Tay، نويسنده , , V.J. Logeeswaran، نويسنده , , K.Y. Zeng، نويسنده , , Lu Shen and F.S. Chau ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
12
From page
45
To page
56
Keywords
Cantilever , Nanoindentation , Bending test , spring constant , microgyroscope
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2003
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367380
Link To Document