Title of article
Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry
Author/Authors
Badariah Bais and Burhanuddin Yeop Majlis ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
9
From page
175
To page
183
Keywords
MEMS , area-changed , microaccelerometer , Capacitive , sensitivity
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2005
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367545
Link To Document