• Title of article

    Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology

  • Author/Authors

    D. Paci، نويسنده , , M. Mastrangeli، نويسنده , , A. Nannini and F. Pieri ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2006
  • Pages
    7
  • From page
    41
  • To page
    47
  • Keywords
    MEMS resonators . FEM simulations .Temperature stability . Residual stress . Tunable MEMSresonators.
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Serial Year
    2006
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Record number

    367675

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367675