Title of article
An intelligent supervisory system for ion implantation in IC fabrication processes
Author/Authors
Li-Cheng Shen and Pau-Lo Hsu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
7
From page
241
To page
247
Keywords
Feature extraction , symptom analysis , Supervision , Fuzzy expert systems , Ion implantation , beam maps
Journal title
Electric Power Systems Research
Serial Year
1999
Journal title
Electric Power Systems Research
Record number
372565
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