Title of article
Real-time monitoring of the growth and decomposition of SiO2 layers on Si(001) by a combined method of RHEED and AES
Author/Authors
Yuji Takakuwa and Fumiaki Ishida، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
7
From page
401
To page
407
Keywords
RHEED , AES , Real-time monitoring , Interface roughness , Surface reactionmodel , Si thermal oxidation , Si(001)231 , Decomposition , Si adatom
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
2001
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
379518
Link To Document