• Title of article

    LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

  • Author/Authors

    Saïd Agouram، نويسنده , , Franz Bodart and Guy Terwagne، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    9
  • From page
    173
  • To page
    181
  • Keywords
    Chromium oxynitride , LEEIXS , XPS
  • Journal title
    JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
  • Serial Year
    2004
  • Journal title
    JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
  • Record number

    379948