Title of article
Characterization of advanced gate stacks for Si CMOS by electron energy-loss spectroscopy in scanning transmission electron microscopy
Author/Authors
Brendan Foran، نويسنده , , Joel Barnett، نويسنده , , Patrick S. Lysaght، نويسنده , , Melody P. Agustin and Susanne Stemmer، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
10
From page
151
To page
160
Keywords
electron energy-loss spectroscopy , Gate dielectrics , Z-contrast imaging , STEMElectron energy-loss spectroscopy , Gate dielectrics , Z-contrast imaging , stem
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
2005
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
380217
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