Title of article
Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometry
Author/Authors
T. Tsuru، نويسنده , , T. Tsutou، نويسنده , , T. Hatano and M. Yamamoto، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
3
From page
1083
To page
1085
Keywords
Rate monitoring , EUV multilayer , Ellipsometry , Layer-by-layer analysis
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
2005
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
380474
Link To Document