Title of article
CF Decomposition of Flue Gas From Semiconductor Process Using Inductively Coupled Plasma
Author/Authors
Tomoyuki Kuroki، نويسنده , , Junko Mine، نويسنده , , Satoshi Odahara، نويسنده , , and Masaaki Okubo، نويسنده , , Toshiaki Yamamoto، نويسنده , , and Noboru Saeki، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
8
From page
221
To page
228
Keywords
perfluorocarbons (PFCs). , Decomposition , inductively coupled plasma (ICP) , CF4 , hydrofluorocarbons (HFCs)
Journal title
IEEE Transactions on Industry Applications
Serial Year
2005
Journal title
IEEE Transactions on Industry Applications
Record number
381699
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