Title of article
MEMS: micro technology, mega impact
Author/Authors
Nagel، نويسنده , , D.J.، نويسنده , , Zaghloul، نويسنده , , M.E.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
12
From page
14
To page
25
Abstract
The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS
Journal title
IEEE Circuits and Devices Magazine
Serial Year
2001
Journal title
IEEE Circuits and Devices Magazine
Record number
397405
Link To Document