Weighing in on logic scaling trends

In this paper, scaling trends and the associated challenges are discussed from the perspective of the 2001 International Technology Roadmap for Semiconductors (ITRS) for both high-performance and low-power logic technologies. Starting from the overall chip circuit requirements, MOSFET and front-end process integration technology requirements, scaling trends, and challenges are discussed, as well as some of the key potential solutions to the challenges, along with the long-term issues and possible solutions for mobility improvement and optimal scaling for very small transistors. Potential solutions include eventual use of high-k gate dielectrics, metal gate electrodes, and perhaps nonclassical MOSFET devices such as double-gate SOI