Title of article
Is there light at the end of the road for optical lithography?
Author/Authors
Levinson، نويسنده , , H.J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
9
From page
50
To page
58
Abstract
As optical lithography nears its physical limits, this article discusses the 2001 ITRS update to the lithography roadmap and reviews the possible next-generation lithography technologies outlined in that update.
Journal title
IEEE Circuits and Devices Magazine
Serial Year
2002
Journal title
IEEE Circuits and Devices Magazine
Record number
397499
Link To Document