Title of article
A low-cost high-performance cleanroom enclosure
Author/Authors
Hutchins، نويسنده , , J.B.; Martin، نويسنده , , M.D.; Belolipetskiy، نويسنده , , S.; Cox، نويسنده , , H.L.، نويسنده , , Jr.; Pitts، نويسنده , , W.K.; Walsh، نويسنده , , K.M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
3
From page
144
To page
146
Abstract
A conventional laboratory room was converted into
a cleanroom for laser microfabrication. These simple techniques
resulted in a measured class 100 environment at the surface
of the optical table, well beyond the class 1000 design goal.
The total conversion costs were approximately 40% the cost
of a comparable commercial modular cleanroom, sufficiently
inexpensive for the devlopment of microfabrication instructional
laboratories.
Keywords
Cleanroom , Laser fabrication , microelectronics.
Journal title
IEEE TRANSACTIONS ON EDUCATION
Serial Year
1999
Journal title
IEEE TRANSACTIONS ON EDUCATION
Record number
397893
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