AEROSOL FORMATION UNDER HETEROGENEOUS/HOMOGENEOUS THERMAL DECOMPOSITION OF SILANE: EXPERIMENT AND NUMERICAL MODELING

Experimental and numerical study of aerosol formation under heterogeneous/homogeneous silane thermal decomposition is carried out. Experimental exploration included monitoring of the following parameters during silane decomposition: silane conversion degree and concentrations of disilane and trisilane; aerosol concentration; size and morphology of aerosol particles; number of monohydride SiH and polyhydride (SiH2)n groups in aerosol particles; number of dangling bond active centers in aerosol particles. To explain the experimental results, a numerical model was developed. It covered homogeneous reactions (involving 11 gaseous species), heterogeneous reactions of silicon wall deposition from gaseous species, aerosol formation and aerosol particle wall deposition. The modeling results are in reasonable agreement with the experimental data.