Title of article
Selective Deposition of Hafnium Oxide Nanothin Films on OTS Patterned Si(100) Substrates by Metal–Organic Chemical Vapor Deposition
Author/Authors
Byung-Chang Kang، نويسنده , , Duk-Young Jung، نويسنده , , Jin-Hyo Boo، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
6
From page
701
To page
706
Keywords
HFO2 thin film , Microcontact printing , selective growth. , metal–organic chemical vapordeposition (MOCVD)
Journal title
IEEE Transactions on Nanotechnology
Serial Year
2006
Journal title
IEEE Transactions on Nanotechnology
Record number
398893
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