• Title of article

    Profile Control in Silicon Nanostructures Using Fluorine-Enhanced Oxide Passivation

  • Author/Authors

    Yi Zhao، نويسنده , , Xin Zhang، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2008
  • Pages
    8
  • From page
    40
  • To page
    47
  • Keywords
    Nanomanufacturing , reactiveion etching , nanomechanosensing , silicon nanostructures , passivation.
  • Journal title
    IEEE Transactions on Nanotechnology
  • Serial Year
    2008
  • Journal title
    IEEE Transactions on Nanotechnology
  • Record number

    399014

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=399014