Measurements of air flow characteristics in a full-scale clean room

Detailed air turbulence characteristics in a full-scale and running fan—filter unit type clean room (4.20 m × 2.97 m × 2.70 m) with and without a clean bench loaded are investigated experimentally. The measurements of the three components of air velocity were conducted by means of a three-dimensional ultrasonic anemometer. Velocity vectors, turbulence intensity, turbulence kinetic energy, and probability density functions of velocity direction and velocity contours in the space domain are presented. The results show that the non-uniformity and deflection angle of air velocity are within 13% and 7.9 degrees, respectively. Moreover, the mean flow patterns, turbulence characteristics, and histogram features of the air flow are discussed. The detailed experimental data are not only useful for clean room design and equipment layout but also helpful for use in the evaluation of numerical modeling in clean room flow fields.