Optimization design of exhaust duct system in semiconductor factory using dynamic programming method

An exhaust duct system in semiconductor factory is designed using the dynamic programming method (DPM), which considers system pressure equilibrium and the least life-cycle cost to derive the duct size and fan capacity. An example of alkaline gas exhaust system is provided to understand the characteristics of DPM and to compare with the conventional duct design methods. Since DPM contains the concept of minimizing the life-cycle cost, the design results not only guarantee each path to share the same pressure, but also bear a smaller cost than other methods. The limit on duct diameter or flow velocity is added to the computation process. As a result, all the derived outcomes satisfy the requirements on the range of duct diameter or flow velocity. The differences between the design and simulation (actual operation) results under DPM are much lower than those of other methods. Thus, an exhaust duct system that best approximates the actual operation may be designed using DPM.