X-ray diffraction line broadening from thermally deposited gold films

Analysis of the diffraction profiles from thermally deposited 111-oriented gold films, ranging in thickness from 300 to 1900 ?, was performed, in combination with atomic force microscopy and transmission electron microscopy studies to provide information on the dimensions of the crystallite columns in the films and the presence of dislocations. Analysis of the magnitude and anisotropy of the observed diffraction line broadening, arising from both crystallite-size effects and dislocation-induced strain effects, indicates that the dislocations have a mixed screw/edge character and tend to form primarily on (111) slip planes parallel to the substrate at densities of ~ 1015 to 1016 m-2.