Title of article
On the evaluation of damping in MEMS in the slip-flow regime
Author/Authors
A. Frangi، نويسنده , , G. Spinola، نويسنده , , S. Lorenzani and B. Vigna، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
21
From page
1031
To page
1051
Abstract
The analysis of fluid damping in micro-electro-mechanical systems (MEMS) is addressed. A mixed
fast multipole boundary element method based on both velocity and traction integral equations is
employed and adapted in order to account for slip boundary conditions. The formulation presented is
applied to the analysis of a biaxial accelerometer and validated with experimental results. Copyright
2006 John Wiley & Sons, Ltd
Keywords
BEM , fast multipole methods , Damping , MEMS
Journal title
International Journal for Numerical Methods in Engineering
Serial Year
2006
Journal title
International Journal for Numerical Methods in Engineering
Record number
425862
Link To Document