• Title of article

    A Design Flow for Micromachined Electromechanical Systems

  • Author/Authors

    Nicholas R. Swart، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    9
  • From page
    39
  • To page
    47
  • Abstract
    I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given
  • Journal title
    IEEE Design and Test of Computers
  • Serial Year
    1999
  • Journal title
    IEEE Design and Test of Computers
  • Record number

    431255