EELS characterization of TiN grown by the DC sputtering technique

The satellite line profile in the C-VV Auger electron spectroscopy spectrum depends upon how the initial core hole state and the final multiple hole state are created. Even if the numbers of the holes in the satellite states are the same, the Auger electron speclroscopy spectral profiles of the final multiple hole states are different. The localization of the three hole satellite state is discussed.