Title of article
New actuation method for push-pull electrostatic MEMS comb drive
Author/Authors
Zhao، Tao نويسنده , , Liang، Yung C نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-1336
From page
1337
To page
0
Abstract
In this paper, a new actuation scheme for the push-pull electrostatic microelectromechanical systems comb drive actuators is proposed. The displacement amplitude excited by the new form of driving voltages can be more than three times as large as that which is achievable using the conventional form for the same applied system voltage
Keywords
histidine modification , Thermophilic bacteria , hydrolytic enzyme , (alpha)-Amylase , enzyme purification , Bacillus subtilis
Journal title
IEEE Transactions on Industrial Electronics
Serial Year
2003
Journal title
IEEE Transactions on Industrial Electronics
Record number
62424
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