• Title of article

    Particle charge distribution measurement in exhaust gases of plasma enhanced processing equipment

  • Author/Authors

    B. R. Forsyth، نويسنده , , B. Y. H. Liu، نويسنده ,

  • Issue Information
    ماهنامه با شماره پیاپی سال 1998
  • Pages
    2
  • From page
    901
  • To page
    902
  • Keywords
    Charge distribution , Aerosol particles , PECVD , Semiconductor Process Exhaust
  • Journal title
    Journal of Aerosol Science
  • Serial Year
    1998
  • Journal title
    Journal of Aerosol Science
  • Record number

    741759

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=741759