Microscopic three-dimensional topometry with ferroelectric liquid-crystal-on-silicon displays

When three-dimensional measurements are conducted with fringe projection, the quality of the grating used for the generation of the fringes is important. It has a direct influence on the achievable depth resolution in a given measurement setup. In the past, Ronchi gratings or gratings written in nematic liquid-crystal displays or in digital micromirror devices have been used. We report on the application of a reflective ferroelectric liquid-crystal-on-silicon display as the fringe-generating element in a setup based on a stereo microscope. With this device the depth resolution of measurements by use of phase-shifting algorithms can be significantly improved compared with the application of a Ronchi grating or a nematic liquid-crystal display.