• Title of article

    Polishing rate for (100) and (110) surfaces

  • Author/Authors

    Yutaka Hasegawa، نويسنده , , Sasuke Miyazima، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1996
  • Pages
    9
  • From page
    663
  • To page
    671
  • Abstract
    We have suggested a simple model for polishing. The model introduced images a float polishing method. We analyze the roughness of the surface during the polishing process from a fractal point of view. The present model provides results in agreement with the experimental fact that the (110) surface of Si is polished faster than (100).
  • Journal title
    Physica A Statistical Mechanics and its Applications
  • Serial Year
    1996
  • Journal title
    Physica A Statistical Mechanics and its Applications
  • Record number

    864353