Title of article
Polishing rate for (100) and (110) surfaces
Author/Authors
Yutaka Hasegawa، نويسنده , , Sasuke Miyazima، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
9
From page
663
To page
671
Abstract
We have suggested a simple model for polishing. The model introduced images a float polishing method. We analyze the roughness of the surface during the polishing process from a fractal point of view. The present model provides results in agreement with the experimental fact that the (110) surface of Si is polished faster than (100).
Journal title
Physica A Statistical Mechanics and its Applications
Serial Year
1996
Journal title
Physica A Statistical Mechanics and its Applications
Record number
864353
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