Preparation of A1/A1N cermet film by co-sputtering; structural aspects and optical properties

Aluminum/aluminiu nitride (A1/A1N) cerment films have been deposited by radio-frequency cosputtering. Determination of percolation threshold qc = 0.22 was derived from microstructural analysis and conductivity measurements. SIMS measurements also revealed inhomogeneities of atomic composition versus depth profile. Optical properties have been reported both in the mid-infrared and partly visible range. Comparison with a model using multilayer-films and Bruggeman model have been made. In the end, the influence of surface roughness on reflectance behaviour is also discussed. For more details, an article on Al-A1N microstructure will be published in a forthcoming paper.