Title of article
How much variability can designers tolerate?
Author/Authors
A.B.، Kahng, نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-95
From page
96
To page
0
Abstract
Designers hate large variations in a gateʹs critical dimensions (CDs) because large variations imply large guardbanding in design. Lithographers hate small variations in CD numbers because they imply impossible process windows. With the publication of the 2003 International Technology Roadmap for Semiconductors (1TRS), gate CD control requirements for lithography and front-end (etching) processes will doubtless receive intense scrutiny.
Keywords
leukemia
Journal title
IEEE Design and Test of Computers
Serial Year
2003
Journal title
IEEE Design and Test of Computers
Record number
90309
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