Texture development of MgO buffer layers grown by inclined substrate deposition

Biaxially textured magnesium oxide (MgO) films used as template layers for YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO)-coated conductors have been grown efficiently and consistently by inclined substrate deposition (ISD). Further improvement in texture and a decrease in surface roughness were obtained by depositing a homoepitaxial MgO layer on the ISD MgO layer at an elevated temperature and flat angle. The texture of the ISD layer was studied as a function of thickness by X-ray diffraction and scanning and transmission electron microscopy. Surface roughness of the ISD and homoepitaxial layers was investigated by atomic force microscopy. Based on the results, the optimal thickness of the ISD layer was determined.