Title of article
System control and management for low-cost high-volume GaAs manufacturing
Author/Authors
K.M.، Adams, نويسنده , , M.E.، Coe, نويسنده , , C.D.، Della-Morrow, نويسنده , , K.P.، Flynn, نويسنده , , J.، Hertle, نويسنده , , Jr.، Klingbeil, L.S., نويسنده , , J.B.، Ploeger, نويسنده , , D.C.، Tebelak, نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-38
From page
39
To page
0
Abstract
With a portfolio consisting of Metal Semiconductor Field Effect Transistors (MESFET), Pseudomorphic High Electron Mobility Transistors (pHEMT), Heterojunction Insulated Gate Field Effect Transistors (HIGFET), and Indium Gallium Phosphide Heterojunction Bipolar Transistors (InGaP-HBT) technology, one factory has embarked on a mission to become a leader of cost and volume gallium arsenide (GaAs) manufacturing. Separate new product and new technology introduction systems have been developed and employed. Furthermore, several manufacturing and yield improvement systems, designed primarily for high-volume silicon factories, have been implemented. Additionally, a comprehensive cost-reduction project was implemented to bring wafer costs to benchmark levels.
Keywords
spermatid , testis , spermatogenesis , male reproductive tract , Gene regulation
Journal title
IEEE Transactions on Semiconductor Manufacturing
Serial Year
2003
Journal title
IEEE Transactions on Semiconductor Manufacturing
Record number
95512
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