Title of article
Slow positron implantation spectroscopy of edge-defined film-fed growth silicon
Author/Authors
PG Coleman، نويسنده , , MARJORIE E. BLOSS، نويسنده , , S. Setzler، نويسنده , , S. LaShell، نويسنده , , Gordon Davies، نويسنده , , W.D. Sawyer، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1995
Pages
4
From page
276
To page
279
Abstract
An effective diffusion length L+ of 90±10 nm has been measured for thermalised positrons in a number of samples of edge-defined film-fed growth (EFG) silicon at room temperature. This value of L+ is some three times shorter than that observed in undefected Si, whereas the characteristic annihilation lineshape parameters associated with EFG and undefected Si are indistinguishable. These results imply that (a) positron diffusion in EFG Si is hampered by shallow trapping by defects - probably substitutional C - present at a concentration of about 100 ppm, and (b) no opendashvolume defects were detected.
Journal title
Applied Surface Science
Serial Year
1995
Journal title
Applied Surface Science
Record number
989955
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